JPH0640477Y2 - 圧電式微動アクチュエータ - Google Patents

圧電式微動アクチュエータ

Info

Publication number
JPH0640477Y2
JPH0640477Y2 JP1988064326U JP6432688U JPH0640477Y2 JP H0640477 Y2 JPH0640477 Y2 JP H0640477Y2 JP 1988064326 U JP1988064326 U JP 1988064326U JP 6432688 U JP6432688 U JP 6432688U JP H0640477 Y2 JPH0640477 Y2 JP H0640477Y2
Authority
JP
Japan
Prior art keywords
fine movement
piezoelectric
casing
preload
actuator element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988064326U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01167378U (en]
Inventor
隆弘 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lossev Technology Corp
Original Assignee
Lossev Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lossev Technology Corp filed Critical Lossev Technology Corp
Priority to JP1988064326U priority Critical patent/JPH0640477Y2/ja
Publication of JPH01167378U publication Critical patent/JPH01167378U/ja
Application granted granted Critical
Publication of JPH0640477Y2 publication Critical patent/JPH0640477Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
JP1988064326U 1988-05-16 1988-05-16 圧電式微動アクチュエータ Expired - Lifetime JPH0640477Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988064326U JPH0640477Y2 (ja) 1988-05-16 1988-05-16 圧電式微動アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988064326U JPH0640477Y2 (ja) 1988-05-16 1988-05-16 圧電式微動アクチュエータ

Publications (2)

Publication Number Publication Date
JPH01167378U JPH01167378U (en]) 1989-11-24
JPH0640477Y2 true JPH0640477Y2 (ja) 1994-10-19

Family

ID=31289797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988064326U Expired - Lifetime JPH0640477Y2 (ja) 1988-05-16 1988-05-16 圧電式微動アクチュエータ

Country Status (1)

Country Link
JP (1) JPH0640477Y2 (en])

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3349259A (en) 1965-05-27 1967-10-24 Kistler Instr Corp Piezoelectric pressure transducer
JP5910155B2 (ja) 2012-02-22 2016-04-27 株式会社明電舎 電力変換装置の電圧制御装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3349259A (en) 1965-05-27 1967-10-24 Kistler Instr Corp Piezoelectric pressure transducer
JP5910155B2 (ja) 2012-02-22 2016-04-27 株式会社明電舎 電力変換装置の電圧制御装置

Also Published As

Publication number Publication date
JPH01167378U (en]) 1989-11-24

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